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David Shortt, technical fellow chez KLA-Tencor, dans une interview à Semiconductor Engineering :
About 30 years ago I first read an article explaining very clearly why we could never possibly make a device smaller than the wavelength of light using imaging. We all know how that turned out, and everyone who bet against optical lithography has been wrong. It always seems like you can’t project more than a couple generations out, but we always seem to be able to do it. As an inspection person, I’m astonished these devices are manufacturable. With 3D NAND, it’s astounding that we can make those.